Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Sascha Perlitz | 2020-04-28 |
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Johannes Ruoff, Ralf Müller, Susanne Beder, Ulrich Matejka, Jens Timo Neumann | 2020-03-31 |