Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10675575 | Method for producing a filter medium, and a filter medium | Anton Kreiner, Markus Weindl, Christian Zisslsberger | 2020-06-09 |
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Johannes Ruoff, Ralf Müller, Susanne Beder, Ulrich Matejka, Hans-Jurgen Mann | 2020-03-31 |