Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490411 | Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures | Kurtis Leschkies, Steven Verhaverbeke, Abhijit Basu Mallick | 2019-11-26 |
| 10418243 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2019-09-17 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Rui Cheng, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick, Deenesh Padhi | 2019-09-10 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2019-09-10 |
| 10403542 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Abhijit Basu Mallick, Praburam Gopalraja | 2019-09-03 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2019-08-06 |
| 10354916 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Abhijit Basu Mallick, Kelvin Chan | 2019-07-16 |
| 10319636 | Deposition and treatment of films for patterning | Atashi Basu, Abhijit Basu Mallick, Srinivas Gandikota | 2019-06-11 |
| 10319604 | Methods for self-aligned patterning | Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota | 2019-06-11 |
| 10319591 | Geometric control of bottom-up pillars for patterning applications | Abhijit Basu Mallick | 2019-06-11 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Abhijit Basu Mallick +1 more | 2019-01-29 |