Issued Patents 2019
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319604 | Methods for self-aligned patterning | Ziqing Duan, Yihong Chen, Srinivas Gandikota | 2019-06-11 |
| 10319600 | Thermal silicon etch | Zihui Li, Rui Cheng, Anchuan Wang, Nitin K. Ingle | 2019-06-11 |
| 10312137 | Hardmask layer for 3D NAND staircase structure in semiconductor applications | Eswaranand Venkatasubramanian, Susmit Singha Roy, Pramit Manna | 2019-06-04 |
| 10280507 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Pramit Manna, Robert Jan Visser, Prerna Goradia +1 more | 2019-05-07 |
| 10276379 | Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide | Rui Cheng, Yihong Chen | 2019-04-30 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Hari Ponnekanti, Mandyam Sriram, Alexandros T. Demos, Mukund Srinivasan +2 more | 2019-03-19 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan +1 more | 2019-01-29 |
| 10176980 | Selective deposition of silicon oxide films | Pramit Manna | 2019-01-08 |