Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090211 | Edge seal for lower electrode assembly | Matthew Busche, Anthony J. Ricci, Henry Povolny, Scott Stevenot | 2018-10-02 |
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Felix Kozakevich | 2018-09-25 |
| 10056225 | Adjusting substrate temperature to improve CD uniformity | Harmeet Singh, Keith Comendant, Vahid Vahedi | 2018-08-21 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2018-08-14 |
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Christopher Kimball, Alexander Matyushkin, Zhigang Chen, Keith Comendant | 2018-06-19 |
| 9922857 | Electrostatically clamped edge ring | Christopher Kimball, Feng Wang | 2018-03-20 |
| 9869392 | Edge seal for lower electrode assembly | David Schaefer, Ambarish Chhatre, Sung Lee, Brooke Mesler Lai | 2018-01-16 |
| 9859142 | Edge seal for lower electrode assembly | David Schaefer, Ambarish Chhatre, Sung Lee | 2018-01-02 |