Issued Patents 2017
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846363 | Processing liquid supplying apparatus and method of supplying processing liquid | Koji Takayanagi, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2017-12-19 |
| 9817323 | Liquid treatment apparatus and method and non-transitory storage medium | Yuichi Yoshida | 2017-11-14 |
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Hiroshi Ichinomiya, Hirosi Nisihata, Ryouichirou Naitou | 2017-10-31 |
| 9741559 | Film forming method, computer storage medium, and film forming system | Satoru Shimura, Fumiko Iwao | 2017-08-22 |
| 9731226 | Solution treatment apparatus and solution treatment method | Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2017-08-15 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Koji Takayanagi, Yuichi Terashita, Toshinobu Furusho, Takashi Sasa | 2017-08-15 |
| 9704730 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Hiroshi Ichinomiya, Hirosi Nisihata | 2017-07-11 |
| 9690202 | Developing method, developing apparatus and storage medium | Yuichi Terashita, Hirofumi Takeguchi, Takeshi Shimoaoki, Tomohiro Iseki | 2017-06-27 |
| 9627232 | Substrate processing method, substrate processing apparatus and non-transitory storage medium | Keiichi Tanaka, Tomohiro Iseki | 2017-04-18 |
| 9613836 | Coating film forming apparatus, coating film forming method, and recording medium | Katsunori Ichino, Yuichi Terashita | 2017-04-04 |
| 9575411 | Developing apparatus, developing method and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2017-02-21 |
| 9568829 | Developing method, developing apparatus and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2017-02-14 |