Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Kousuke Yoshihara, Hirosi Nisihata, Ryouichirou Naitou | 2017-10-31 |
| 9704730 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Kousuke Yoshihara, Hirosi Nisihata | 2017-07-11 |