Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Kousuke Yoshihara, Hiroshi Ichinomiya, Hirosi Nisihata | 2017-10-31 |