Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805958 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Kousuke Yoshihara, Hiroshi Ichinomiya, Hirosi Nisihata, Ryouichirou Naitou | 2017-10-31 |
| 9704730 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Kousuke Yoshihara, Hiroshi Ichinomiya, Hirosi Nisihata | 2017-07-11 |
| 9570327 | Substrate liquid treatment apparatus and substrate liquid treatment method | Masahiro Fukuda, Akihiro Kubo, Taro Yamamoto, Kenzi YADA | 2017-02-14 |