Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716002 | Substrate cleaning method | Yasushi Takiguchi, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai, Naoto Yoshitaka +2 more | 2017-07-25 |
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Kenji Yada, Masashi Enomoto, Noboru Nakashima | 2017-06-06 |
| 9625821 | Developing apparatus | Masahiro Fukuda | 2017-04-18 |
| 9575411 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi | 2017-02-21 |
| 9568829 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi, Masahiro Fukuda | 2017-02-14 |
| 9570327 | Substrate liquid treatment apparatus and substrate liquid treatment method | Masahiro Fukuda, Akihiro Kubo, Kenzi YADA, Atsushi Ookouchi | 2017-02-14 |