Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Kenji Yada, Noboru Nakashima | 2017-06-06 |
| 9601394 | Substrate processing apparatus, substrate processing method and memory medium | Teruhiko Kodama | 2017-03-21 |
| 9588267 | Optical element and method for producing the same | Tsutomu Nagahama, Hironori Yoshida, Masaharu Senoue, Hiroyuki Itou | 2017-03-07 |