Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786488 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita | 2017-10-10 |
| 9711419 | Substrate backside texturing | Carlos A. Fonseca, Benjamen M. Rathsack, Jeffrey Smith, Anton J. deVilliers, Lior Huli +1 more | 2017-07-18 |
| 9601394 | Substrate processing apparatus, substrate processing method and memory medium | Masashi Enomoto | 2017-03-21 |