Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786488 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Teruhiko Kodama | 2017-10-10 |
| 9731226 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2017-08-15 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Koji Takayanagi, Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa | 2017-08-15 |
| 9690202 | Developing method, developing apparatus and storage medium | Hirofumi Takeguchi, Takeshi Shimoaoki, Kousuke Yoshihara, Tomohiro Iseki | 2017-06-27 |
| 9613836 | Coating film forming apparatus, coating film forming method, and recording medium | Katsunori Ichino, Kousuke Yoshihara | 2017-04-04 |