Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690202 | Developing method, developing apparatus and storage medium | Yuichi Terashita, Hirofumi Takeguchi, Takeshi Shimoaoki, Kousuke Yoshihara | 2017-06-27 |
| 9649577 | Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording medium | Hideo Funakoshi, Seiya Totsuka | 2017-05-16 |
| 9627232 | Substrate processing method, substrate processing apparatus and non-transitory storage medium | Keiichi Tanaka, Kousuke Yoshihara | 2017-04-18 |