HT

Hirofumi Takeguchi

TL Tokyo Electron Limited: 2 patents #108 of 744Top 15%
Overall (2017): #147,563 of 506,227Top 30%
2
Patents 2017

Issued Patents 2017

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9731226 Solution treatment apparatus and solution treatment method Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more 2017-08-15
9690202 Developing method, developing apparatus and storage medium Yuichi Terashita, Takeshi Shimoaoki, Kousuke Yoshihara, Tomohiro Iseki 2017-06-27