Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846363 | Processing liquid supplying apparatus and method of supplying processing liquid | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2017-12-19 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Kousuke Yoshihara, Yuichi Terashita, Toshinobu Furusho, Takashi Sasa | 2017-08-15 |
| 9576829 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Hiroshi Marumoto, Kenji Adachi | 2017-02-21 |
| 9576934 | Semiconductor device | — | 2017-02-21 |