| 9842965 |
Textured devices |
Erik Byers, Scott E. Sills |
2017-12-12 |
| 9837314 |
Self-alignment of metal and via using selective deposition |
Jeffrey Smith |
2017-12-05 |
| 9824894 |
Method for correcting wafer bow from overlay |
— |
2017-11-21 |
| 9818611 |
Methods of forming etch masks for sub-resolution substrate patterning |
— |
2017-11-14 |
| 9760008 |
Direct current superposition freeze |
— |
2017-09-12 |
| 9741580 |
Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate |
Vishal Sipani, William R. Brown, Shane J. Trapp, Ranjan Khurana, Kevin R. Shea |
2017-08-22 |
| 9735067 |
Substrate tuning system and method using optical projection |
Daniel Fulford, Gerrit J. Leusink |
2017-08-15 |
| 9718082 |
Inline dispense capacitor |
Ronald Nasman, James Grootegoed, Norman A. Jacobson, Jr. |
2017-08-01 |
| 9721793 |
Method of patterning without dummy gates |
Jeffrey Smith |
2017-08-01 |
| 9711419 |
Substrate backside texturing |
Carlos A. Fonseca, Benjamen M. Rathsack, Jeffrey Smith, Lior Huli, Teruhiko Kodama +1 more |
2017-07-18 |
| 9673050 |
Method of patterning incorporating overlay error protection |
Jeffrey Smith |
2017-06-06 |
| 9666531 |
Semiconductor device structures |
Adam L. Olson, Kaveri Jain, Lijing Gou, William R. Brown, Ho Seop Eom +1 more |
2017-05-30 |
| 9653319 |
Method for using post-processing methods for accelerating EUV lithography |
Kaushik A. Kumar |
2017-05-16 |
| 9653315 |
Methods of fabricating substrates |
Scott E. Sills, Gurtej S. Sandhu |
2017-05-16 |
| 9645495 |
Critical dimension control in photo-sensitized chemically-amplified resist |
— |
2017-05-09 |
| 9645391 |
Substrate tuning system and method using optical projection |
— |
2017-05-09 |
| 9646898 |
Methods for treating a substrate by optical projection of a correction pattern based on a detected spatial heat signature of the substrate |
Daniel Fulford, Gerrit J. Leusink |
2017-05-09 |
| 9646845 |
Method of forming a mask for substrate patterning |
— |
2017-05-09 |
| 9620383 |
Method for uncovering underlying alignment patterns |
— |
2017-04-11 |
| 9595441 |
Patterning a substrate using grafting polymer material |
Jeffrey Smith |
2017-03-14 |
| 9583381 |
Methods for forming semiconductor devices and semiconductor device structures |
Ranjan Khurana, Michael Hyatt, Scott L. Light, Kevin J. Torek |
2017-02-28 |
