Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735067 | Substrate tuning system and method using optical projection | Anton J. deVilliers, Daniel Fulford | 2017-08-15 |
| 9711449 | Ruthenium metal feature fill for interconnects | Kai-Hung Yu, Cory Wajda, Tadahiro Ishizaka, Takahiro Hakamata | 2017-07-18 |
| 9646898 | Methods for treating a substrate by optical projection of a correction pattern based on a detected spatial heat signature of the substrate | Anton J. deVilliers, Daniel Fulford | 2017-05-09 |