Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793137 | Use of grapho-epitaxial directed self-assembly applications to precisely cut logic lines | Mark H. Somervell | 2017-10-17 |
| 9735026 | Controlling cleaning of a layer on a substrate using nozzles | Ian J. Brown, Wallace P. Printz | 2017-08-15 |
| 9715172 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Mark H. Somervell | 2017-07-25 |
| 9711419 | Substrate backside texturing | Carlos A. Fonseca, Jeffrey Smith, Anton J. deVilliers, Lior Huli, Teruhiko Kodama +1 more | 2017-07-18 |
| 9633847 | Using sub-resolution openings to aid in image reversal, directed self-assembly, and selective deposition | Mark H. Somervell | 2017-04-25 |
| 9618848 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Michael A. Carcasi, Joshua Hooge, Seiji Nagahara | 2017-04-11 |
| 9613801 | Integration of absorption based heating bake methods into a photolithography track system | Michael A. Carcasi, Mark H. Somervell | 2017-04-04 |