Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852920 | Etch system and method for single substrate processing | Ian J. Brown | 2017-12-26 |
| 9735026 | Controlling cleaning of a layer on a substrate using nozzles | Ian J. Brown, Benjamen M. Rathsack | 2017-08-15 |