Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786523 | Method and apparatus for substrate rinsing and drying | Carlos A. Fonseca | 2017-10-10 |
| 9746774 | Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist (PS-CAR) | Mark H. Somervell | 2017-08-29 |
| 9618848 | Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes | Joshua Hooge, Benjamen M. Rathsack, Seiji Nagahara | 2017-04-11 |
| 9612534 | Exposure dose homogenization through rotation, translation, and variable processing conditions | Mark Schattenburg, Rudolf H. Hendel | 2017-04-04 |
| 9613801 | Integration of absorption based heating bake methods into a photolithography track system | Mark H. Somervell, Benjamen M. Rathsack | 2017-04-04 |