Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793137 | Use of grapho-epitaxial directed self-assembly applications to precisely cut logic lines | Benjamen M. Rathsack | 2017-10-17 |
| 9746774 | Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist (PS-CAR) | Michael A. Carcasi | 2017-08-29 |
| 9715172 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Benjamen M. Rathsack | 2017-07-25 |
| 9633847 | Using sub-resolution openings to aid in image reversal, directed self-assembly, and selective deposition | Benjamen M. Rathsack | 2017-04-25 |
| 9613801 | Integration of absorption based heating bake methods into a photolithography track system | Michael A. Carcasi, Benjamen M. Rathsack | 2017-04-04 |