MS

Mark Schattenburg

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
📍 Framingham, MA: #56 of 156 inventorsTop 40%
🗺 Massachusetts: #4,682 of 13,044 inventorsTop 40%
Overall (2017): #316,790 of 506,227Top 65%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9612534 Exposure dose homogenization through rotation, translation, and variable processing conditions Rudolf H. Hendel, Michael A. Carcasi 2017-04-04