Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791779 | EUV resist etch durability improvement and pattern collapse mitigation | — | 2017-10-17 |
| 9711419 | Substrate backside texturing | Carlos A. Fonseca, Benjamen M. Rathsack, Jeffrey Smith, Anton J. deVilliers, Teruhiko Kodama +1 more | 2017-07-18 |