Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Masahiro Fukuda, Taro Yamamoto, Kenji Yada, Masashi Enomoto, Noboru Nakashima | 2017-06-06 |
| 9570327 | Substrate liquid treatment apparatus and substrate liquid treatment method | Masahiro Fukuda, Taro Yamamoto, Kenzi YADA, Atsushi Ookouchi | 2017-02-14 |