Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846594 | Workflow control apparatus and method therefor | Shoichi Kogiso, Takamasa Ohashi, Yusuke Kuchiwaki, Masakazu Furukawa, Takashi Ikezaki | 2017-12-19 |
| 9669510 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Taro Yamamoto, Kenji Yada, Masashi Enomoto, Noboru Nakashima | 2017-06-06 |
| 9625821 | Developing apparatus | Taro Yamamoto | 2017-04-18 |
| 9568829 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2017-02-14 |
| 9570327 | Substrate liquid treatment apparatus and substrate liquid treatment method | Akihiro Kubo, Taro Yamamoto, Kenzi YADA, Atsushi Ookouchi | 2017-02-14 |
| 9563168 | Image forming apparatus | — | 2017-02-07 |