KM

Koshi MUTA

TL Tokyo Electron Limited: 3 patents #64 of 744Top 9%
Overall (2017): #70,347 of 506,227Top 15%
3
Patents 2017

Issued Patents 2017

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
9835948 Developing method, developing apparatus, and recording medium Hideharu Kyoda 2017-12-05
9575411 Developing apparatus, developing method and storage medium Kousuke Yoshihara, Hideharu Kyouda, Taro Yamamoto, Yasushi Takiguchi 2017-02-21
9568829 Developing method, developing apparatus and storage medium Kousuke Yoshihara, Hideharu Kyouda, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda 2017-02-14