Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716002 | Substrate cleaning method | Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai, Naoto Yoshitaka +2 more | 2017-07-25 |
| 9575411 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto | 2017-02-21 |
| 9568829 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Masahiro Fukuda | 2017-02-14 |
| 9570326 | Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium | Ryoichi Uemura | 2017-02-14 |