Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812294 | Sub-pulsing during a state | John C. Valcore, Jr., Bradford J. Lyndaker | 2017-11-07 |
| 9805941 | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) | Keren Jacobs Kanarik, Jeffrey Marks, Samantha Tan, Alexander Kabansky, Wenbing Yang +3 more | 2017-10-31 |
| 9696640 | Lithographic apparatus | Adrianus Hendrik Koevoets, Theodorus Petrus Maria Cadee | 2017-07-04 |
| 9659783 | High aspect ratio etch with combination mask | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler +2 more | 2017-05-23 |
| 9646861 | Heating plate with heating zones for substrate processing and method of use thereof | Keith Gaff, Neil Benjamin, Keith Comendant | 2017-05-09 |
| 9613834 | Replaceable upper chamber section of plasma processing apparatus | Leonard J. Sharpless, Michael Kang | 2017-04-04 |
| 9589853 | Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber | Monica Titus, Gowri Kamarthy, Yoshie Kimura, Meihua Shen, Baosuo Zhou +2 more | 2017-03-07 |
| 9576811 | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) | Keren Jacobs Kanarik, Jeffrey Marks, Samantha Tan, Alexander Kabansky, Wenbing Yang +3 more | 2017-02-21 |
| 9543171 | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element | Ole Waldmann, Eric A. Pape, Keith Gaff | 2017-01-10 |