Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837312 | Atomic layer etching for enhanced bottom-up feature fill | Samantha Tan, Taeseung Kim, Jengyi Yu, Praveen Nalla, Novy Tjokro +1 more | 2017-12-05 |
| 9805941 | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) | Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky, Wenbing Yang +3 more | 2017-10-31 |
| 9583316 | Inert-dominant pulsing in plasma processing systems | — | 2017-02-28 |
| 9576811 | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) | Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky, Wenbing Yang +3 more | 2017-02-21 |