Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761457 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2017-09-12 |
| 9679781 | Methods for integrated circuit fabrication with protective coating for planarization | Mirzafer Abatchev, David H. Wells, Krupakar M. Subramanian | 2017-06-13 |
| 9589853 | Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber | Monica Titus, Gowri Kamarthy, Harmeet Singh, Yoshie Kimura, Meihua Shen +2 more | 2017-03-07 |
| 9570320 | Method to etch copper barrier film | Meihua Shen, Ji Zhu, Shuogang Huang, John Hoang, Prithu Sharma +1 more | 2017-02-14 |