Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570320 | Method to etch copper barrier film | Meihua Shen, Ji Zhu, Baosuo Zhou, John Hoang, Prithu Sharma +1 more | 2017-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570320 | Method to etch copper barrier film | Meihua Shen, Ji Zhu, Baosuo Zhou, John Hoang, Prithu Sharma +1 more | 2017-02-14 |