Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659783 | High aspect ratio etch with combination mask | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Aaron Eppler, Thorsten Lill +2 more | 2017-05-23 |
| 9618846 | PECVD films for EUV lithography | Nader Shamma, Donald K. Schlosser | 2017-04-11 |