Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779974 | System and method for reducing temperature transition in an electrostatic chuck | Tao Zhang, Eric A. Pape | 2017-10-03 |
| 9716022 | Method of determining thermal stability of a substrate support assembly | Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff | 2017-07-25 |
| 9543171 | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element | Eric A. Pape, Keith Gaff, Harmeet Singh | 2017-01-10 |