Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716022 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Eric A. Pape, Keith Gaff | 2017-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716022 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Eric A. Pape, Keith Gaff | 2017-07-25 |