Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9687908 | Method of casting internal features | — | 2017-06-27 |
| 9689533 | Coating method for gas delivery system | Ian Kenworthy, Duane Outka, Fangli Hao, Yijun Du | 2017-06-27 |
| 9613834 | Replaceable upper chamber section of plasma processing apparatus | Harmeet Singh, Michael Kang | 2017-04-04 |