Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979651 | Method for forming alignment features and back-side contacts with fewer lithography and etch steps | Kay Hellig, Douglas J. Bonser | 2005-12-27 |
| 6960804 | Semiconductor device having a gate structure surrounding a fin | Chih-Yuh Yang, Shibly S. Ahmed, Judy Xilin An, Bin Yu | 2005-11-01 |
| 6921963 | Narrow fin FinFET | Zoran Krivokapic, Judy Xilin An, Haihong Wang, Bin Yu | 2005-07-26 |
| 6900139 | Method for photoresist trim endpoint detection | Douglas J. Bonser, Karen Turnquest | 2005-05-31 |
| 6897527 | Strained channel FinFET | Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu | 2005-05-24 |
| 6884733 | Use of amorphous carbon hard mask for gate patterning to eliminate requirement of poly re-oxidation | Scott A. Bell, David E. Brown, Philip A. Fisher | 2005-04-26 |
| 6875664 | Formation of amorphous carbon ARC stack having graded transition between amorphous carbon and ARC material | Richard J. Huang, Philip A. Fisher, Cyrus E. Tabery, Lu You | 2005-04-05 |
| 6864164 | Finfet gate formation using reverse trim of dummy gate | Zoran Krivokapic, Cyrus E. Tabery | 2005-03-08 |
| 6855627 | Method of using amorphous carbon to prevent resist poisoning | Scott A. Bell, Richard J. Huang, Richard Nguyen, Cyrus E. Tabery | 2005-02-15 |
| 6855582 | FinFET gate formation using reverse trim and oxide polish | Cyrus E. Tabery | 2005-02-15 |
| 6849530 | Method for semiconductor gate line dimension reduction | Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Philip A. Fisher +1 more | 2005-02-01 |