Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979651 | Method for forming alignment features and back-side contacts with fewer lithography and etch steps | Kay Hellig, Srikanteswara Dakshina-Murthy | 2005-12-27 |
| 6913958 | Method for patterning a feature using a trimmed hardmask | Marina V. Plat, Marilyn I. Wright, Chih-Yuh Yang | 2005-07-05 |
| 6900139 | Method for photoresist trim endpoint detection | Srikanteswara Dakshina-Murthy, Karen Turnquest | 2005-05-31 |
| 6893967 | L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials | Marilyn I. Wright, Lu You, Kay Hellig | 2005-05-17 |
| 6881616 | System for forming a semiconductor device and method thereof including implanting through a L shaped spacer to form source and drain regions | Kay Hellig, Wen-Jie Qi | 2005-04-19 |
| 6849530 | Method for semiconductor gate line dimension reduction | Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Srikanteswara Dakshina-Murthy, Philip A. Fisher +1 more | 2005-02-01 |