Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972255 | Semiconductor device having an organic anti-reflective coating (ARC) and method therefor | Douglas M. Reber, Mark D. Hall, Kurt H. Junker, Kyle Patterson, Tab A. Stephens +2 more | 2005-12-06 |
| 6913958 | Method for patterning a feature using a trimmed hardmask | Marina V. Plat, Chih-Yuh Yang, Douglas J. Bonser | 2005-07-05 |
| 6900002 | Antireflective bi-layer hardmask including a densified amorphous carbon layer | Marina V. Plat, Lu You, Scott A. Bell | 2005-05-31 |
| 6893967 | L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials | Douglas J. Bonser, Lu You, Kay Hellig | 2005-05-17 |
| 6864556 | CVD organic polymer film for advanced gate patterning | Lu You, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Richard J. Huang +2 more | 2005-03-08 |