Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927113 | Semiconductor component and method of manufacture | Kashmir Sahota, Jeremy I. Martin, James J. Xie | 2005-08-09 |
| 6875664 | Formation of amorphous carbon ARC stack having graded transition between amorphous carbon and ARC material | Srikanteswara Dakshina-Murthy, Philip A. Fisher, Cyrus E. Tabery, Lu You | 2005-04-05 |
| 6869734 | EUV reflective mask having a carbon film and a method of making such a mask | Christopher F. Lyons, Cyrus E. Tabery | 2005-03-22 |
| 6864556 | CVD organic polymer film for advanced gate patterning | Lu You, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Christopher F. Lyons +2 more | 2005-03-08 |
| 6855627 | Method of using amorphous carbon to prevent resist poisoning | Srikanteswara Dakshina-Murthy, Scott A. Bell, Richard Nguyen, Cyrus E. Tabery | 2005-02-15 |