Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972576 | Electrical critical dimension measurement and defect detection for reticle fabrication | Khoi A. Phan, Cyrus E. Tabery, Bhanwar Singh | 2005-12-06 |
| 6955939 | Memory element formation with photosensitive polymer dielectric | Terence Tong, Patrick K. Cheung | 2005-10-18 |
| 6906777 | Pellicle for a lithographic lens | Jongwook Kye, Carl P. Babcock | 2005-06-14 |
| 6900124 | Patterning for elliptical Vss contact on flash memory | Hung-Eil Kim, Anna M. Minvielle, Marina V. Plat, Ramkumar Subramanian | 2005-05-31 |
| 6878961 | Photosensitive polymeric memory elements | Ramkumar Subramanian, Mark S. Chang | 2005-04-12 |
| 6869888 | E-beam flood exposure of spin-on material to eliminate voids in vias | Marina V. Plat, Ramkumar Subramanian, Bhanwar Singh | 2005-03-22 |
| 6869734 | EUV reflective mask having a carbon film and a method of making such a mask | Cyrus E. Tabery, Richard J. Huang | 2005-03-22 |
| 6864556 | CVD organic polymer film for advanced gate patterning | Lu You, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Richard J. Huang +2 more | 2005-03-08 |
| 6864024 | Real-time control of chemically-amplified resist processing on wafer | Bharath Rangarajan | 2005-03-08 |
| 6852455 | Amorphous carbon absorber/shifter film for attenuated phase shift mask | Cyrus E. Tabery | 2005-02-08 |
| 6849530 | Method for semiconductor gate line dimension reduction | Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Srikanteswara Dakshina-Murthy +1 more | 2005-02-01 |