Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972201 | Using scatterometry to detect and control undercut for ARC with developable BARCs | Ramkumar Subramanian, Bhanwar Singh | 2005-12-06 |
| 6972576 | Electrical critical dimension measurement and defect detection for reticle fabrication | Christopher F. Lyons, Cyrus E. Tabery, Bhanwar Singh | 2005-12-06 |
| 6954678 | Artificial intelligence system for track defect problem solving | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2005-10-11 |
| 6924157 | Real time particle monitor inside of plasma chamber during resist strip processing | Bhanwar Singh, Bharath Rangarajan | 2005-08-02 |
| 6915177 | Comprehensive integrated lithographic process control system based on product design and yield feedback system | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2005-07-05 |
| 6844206 | Refractive index system monitor and control for immersion lithography | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2005-01-18 |