Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977717 | Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system | Ivan Lalovic, Bruno M. LaFontaine | 2005-12-20 |
| 6906777 | Pellicle for a lithographic lens | Carl P. Babcock, Christopher F. Lyons | 2005-06-14 |