Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977717 | Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system | Ivan Lalovic, Jongwook Kye | 2005-12-20 |
| 6977718 | Lithography method and system with adjustable reflector | — | 2005-12-20 |
| 6950176 | Method and system for monitoring EUV lithography mask flatness | Ivan Lavolic | 2005-09-27 |