Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977717 | Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system | Bruno M. LaFontaine, Jongwook Kye | 2005-12-20 |
| 6853653 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Robert N. Jacques, Armen Kroyan +2 more | 2005-02-08 |