Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963595 | Automatic gas control system for a gas discharge laser | Richard Morton, Vladimir V. Fleurov, Fedor Trintchouk, Toshihiko Ishihara, Alexander I. Ershov +1 more | 2005-11-08 |
| 6853653 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, Robert N. Jacques, Armen Kroyan, Ivan Lalovic +2 more | 2005-02-08 |