Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831364 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Stephen E. Greco, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Kenneth P. Rodbell +1 more | 2004-12-14 |
| 6831363 | Structure and method for reducing thermo-mechanical stress in stacked vias | Sanjit Das, Brett H. Engel, Brian Herbst, Habib Hichri, Bernd Kastenmeier +8 more | 2004-12-14 |
| 6815329 | Multilayer interconnect structure containing air gaps and method for making | Katherina Babich, Roy A. Carruthers, Alfred Grill, Jeffrey Hedrick, Christopher V. Jahnes +4 more | 2004-11-09 |
| 6815813 | Self-contained heat sink and a method for fabricating same | Kevin S. Petrarca, Michelle L. Steen, Cornelia K. Tsang, Richard P. Volant | 2004-11-09 |
| 6798029 | Method of fabricating micro-electromechanical switches on CMOS compatible substrates | Richard P. Volant, John C. Bisson, Donna R. Cote, Robert A. Groves, Kevin S. Petrarca +2 more | 2004-09-28 |
| 6784485 | Diffusion barrier layer and semiconductor device containing same | Stephan A. Cohen, John A. Fitzsimmons, Stephen M. Gates, Lynne M. Gignac, Paul C. Jamison +5 more | 2004-08-31 |
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Minakshisundaran Balasubramanian Anand, Michael D. Armacost, Shyng-Tsong Chen, Stephen M. Gates, Stephen E. Greco +2 more | 2004-05-11 |
| 6724069 | Spin-on cap layer, and semiconductor device containing same | Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Christy S. Tyberg | 2004-04-20 |
| 6720249 | Protective hardmask for producing interconnect structures | Christopher V. Jahnes, Joyce C. Liu, Sampath Purushothaman | 2004-04-13 |