Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Timothy J. Dalton, Minakshisundaran Balasubramanian Anand, Michael D. Armacost, Stephen M. Gates, Stephen E. Greco +2 more | 2004-05-11 |
| 6712681 | Polishing pads with polymer filled fibrous web, and methods for fabricating and using same | Kenneth P. Rodbell, Oscar K. Hsu, Jean Vangsness, David S. Gilbride, Scott C. Billings +1 more | 2004-03-30 |
| 6685548 | Grooved polishing pads and methods of use | Kenneth M. Davis, Kenneth P. Rodbell | 2004-02-03 |