Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Scott A. Estes +9 more | 2004-11-02 |
| 6712681 | Polishing pads with polymer filled fibrous web, and methods for fabricating and using same | Shyng-Tsong Chen, Kenneth P. Rodbell, Oscar K. Hsu, Jean Vangsness, David S. Gilbride +1 more | 2004-03-30 |
| 6685548 | Grooved polishing pads and methods of use | Shyng-Tsong Chen, Kenneth P. Rodbell | 2004-02-03 |