Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis +9 more | 2004-11-02 |
| 6758912 | Method of inhibiting contaminants using dilute acid rinse | Virginia Chi-Chuen Chao, Thomas B. Faure, Thomas M. Wagner | 2004-07-06 |
| 6699400 | Etch process and apparatus therefor | Arne Ballantine, Emily E. Fisch, Gary L. Milo, Ronald A. Warren | 2004-03-02 |